Wafer-Level Atomic Force Microscoperoscope

Name: Wafer-Level Atomic Force Microscoperoscope
Brand: Truth Instruments Co., Ltd.
SKU: AtomEdge Pro
Availability: InStock

Wafer-Level Atomic Force Microscope Product Model: AtomMax Product Overview: Using micro-cantilever probe structures, this instrument enables 3D morphology characterization of conductive, semiconductive, and insulating solid materials, achieving wafer-level large-sample morphology characterization. Combined with an optical image, the electrically driven sample positioning stage allows for 1 μm positioning accuracy within a 200 x 200 mm area. with fully automated operations

Tags:

AFM Microscope

AFM Systems

Scanning Probe Microscope

Product Details

Highlight:

Wafer Level Atomic Force Microscopes

Atomic Force Microscopes 0.1Hz

30Hz Probe Microscope

Name: Atomic Force Microscopes

Scanning Angle: 0~360"

Scanning Range: Maximum 100μm * 100μm * 910μm

Sample Size: Compatible With 8-inch Wafers And Below

Multi-Function Measurement: EFM,KFM,PFM,MFM

Scan Speed: 0.1Hz-30Hz

Basic Properties

Place of Origin: CHINA

Brand Name: Truth Instruments

Model Number: AtomEdge Pro

Trading Properties

Minimum Order Quantity: 1

Price: Price Negotiable | Contact us for a detailed quote

Payment Terms: T/T

Product Description

Wafer-Level Atomic Force Microscope

Product Model:

AtomMax

Product Overview:

Using micro-cantilever probe structures, this instrument enables 3D morphology characterization of conductive, semiconductive, and insulating solid materials, achieving wafer-level large-sample morphology characterization. Combined with an optical image, the electrically driven sample positioning stage allows for 1 μm positioning accuracy within a 200 x 200 mm area. with fully automated operations for laser alignment, probe approach, and scanning parameter adjust.ments.

Equipment Performance Specifications

Parameter	Specification
Sample Size	Compatible with 8-inch wafers and below
Scanning Range	Maximum 100μm * 100μm * 910μm
Scanning Angle	0~360"
Resolution	Z-axis closed-loop resolution 0.15 nm; X/Y closed-loop resolution 0.5 nm
Scanning Probe XY Direction lmage Resolution	Not less than 32x32~4000x4000
Operating Modes	Contact mode, tapping mode, phase imaging mode, lift mode, multi-directional scanning mode
Multi-Function Measurement	EFM,KFM,PFM,MFM