Wafer Level MOKE System 0.3 Mdeg For Rapid Hysteresis Loops And Process Control

Product Description:

The Wafer-Level Hysteresis Loop Measurement Instrument is a cutting-edge tool designed for non-destructive hysteresis loop measurement of magnetic stacks/devices, automatic extraction of hysteresis loop information including free layer and pinned layer Hc, Hex, and M (Kerr angle value), as well as rapid mapping of wafer magnetic characteristic distribution.

With an impressive uptime of 90%, this instrument ensures reliable and consistent performance for your testing needs. Its advanced testing functions enable users to accurately measure and analyze the magnetic properties of various materials with ease and efficiency.

One of the key features of this instrument is its testing efficiency, offering a high throughput of 12 WPH at ±1.3 T /9 sites measurement/200 mm wafer. This exceptional testing speed allows for quick and precise data collection, making it ideal for high-volume production environments.

For added flexibility, the instrument also offers an optional EFEM (Equipment Front End Module) integration, allowing for seamless integration with existing wafer processing systems.

The Wafer-Level Hysteresis Loop Measurement Instrument boasts a magnetic field resolution of PID closed-loop feedback regulation, ensuring precise and accurate measurements with a resolution of 0.01 MT. This level of precision is crucial for in-depth analysis and characterization of magnetic materials.

Overall, this advanced instrument is a versatile solution for wafer magnetometer applications, wafer scale MOKE (Magneto-Optical Kerr Effect) measurements, and spintronics metrology. Its innovative features and high-performance capabilities make it an essential tool for researchers and manufacturers working in the field of magnetic materials and spintronics.

Features:

• Product Name: Wafer-Level Hysteresis Loop Measurement Instrument
• Kerr Angle Resolution: 0.3 Mdeg (RMS)
• Sample Repeatability: Better Than 10 μm
• Magnetic Field Uniformity: Better Than ±1%@Φ1 Mm
• Testing Efficiency: 12 WPH@±1.3 T /9 Sites Measurement/200 Mm Wafer
• EFEM: Optional

Technical Parameters:

Applications:

Truth Instruments' Wafer-MOKE is a cutting-edge magnetic metrology tool designed for precise hysteresis loop measurements on thin film magnetic wafers. This innovative instrument, originating from China, offers unparalleled accuracy and efficiency in characterizing magnetic properties.

With the Wafer-MOKE, researchers and manufacturers can perform wafer-level hysteresis loop measurements in a variety of application occasions and scenarios. The optional EFEM integration allows for seamless automation and integration into existing semiconductor manufacturing processes, enhancing productivity and reducing manual intervention.

One of the key features of the Wafer-MOKE is its versatile magnetic field capabilities. The instrument can generate vertical magnetic fields up to ±2.4 T and in-plane magnetic fields up to ±1.3 T, catering to a wide range of magnetic material testing requirements. Moreover, the magnetic field uniformity of better than ±1% at Φ1 mm ensures reliable and consistent measurement results across the wafer.

For global detection and quality control in the semiconductor industry, the Wafer-MOKE offers exceptional uptime of 90%, ensuring continuous operation and minimal downtime. This high uptime percentage is crucial for meeting production demands and maintaining throughput in magnetic wafer inspection processes.

In addition, the Wafer-MOKE boasts impressive sample repeatability, with results better than 10 μm. This level of precision is essential for research and development activities, where accurate and reproducible measurements are paramount.

Overall, the Truth Instruments Wafer-MOKE is a state-of-the-art solution for thin film magnetic wafer inspection, offering unmatched performance and reliability in magnetic metrology applications.